Rotational speed sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Details

C073S514290, C073S514320

Reexamination Certificate

active

06691571

ABSTRACT:

FIELD OF THE INVENTION
The present invention is based on an rate-of-rotation sensor.
BACKGROUND INFORMATION
Rate-of-rotation sensors in which a Coriolis element is arranged on the surface of a substrate are referred to in U.S. Pat. No. 6,067,858. The Coriolis element is induced to oscillate in a first axis. The deflections of the Coriolis element due to a Coriolis force in a second axis, which is also parallel to the substrate, are proved.
SUMMARY OF THE INVENTION
An example rate-of-rotation sensor according to the present invention may provide both an excitation element as well as a proof element. Therefore, the proof may occur at a proof element that only moves in the proof direction. The excitation may be performed using an element that only moves in the excitation direction. In such an example system, it may be easy to interpret the frequencies of the oscillations in each of the directions.
The excitation of the oscillations of the Coriolis element may be implemented in a simple manner by a drive element which transmits driving forces via springs. The Coriolis element may be completely suspended at this drive element. Electrostatic comb drives may be provided at the drive element as an excitation arrangement. The proof elements may be suspended on the substrate in a simple manner so that a movement occurs only in the direction of the Coriolis forces. Interference effects due to a movement of the movable electrodes that are not in the proof direction may be suppressed in this manner. An additional Coriolis element may be provided to suppress linear accelerations occurring in the proof direction. In order to then ensure an opposite-phase oscillation of the two Coriolis elements, the opposite-phase oscillation may differ in its frequency from the in-phase oscillation. For this purpose, coupling springs may be provided between drive elements and/or Coriolis elements, or between drive elements and proof elements.


REFERENCES:
patent: 5396797 (1995-03-01), Hulsing
patent: 5604312 (1997-02-01), Lutz
patent: 5635638 (1997-06-01), Geen
patent: 5728936 (1998-03-01), Lutz
patent: 6067858 (2000-05-01), Clark et al.
patent: 44 14 237 (1995-10-01), None
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patent: 196 41 284 (1998-05-01), None
patent: 100 35 605 (2001-01-01), None
patent: 0 911 606 (1999-04-01), None
patent: WO 98 15799 (1998-04-01), None

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