Rotation rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Reexamination Certificate

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07316161

ABSTRACT:
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

REFERENCES:
patent: 5600064 (1997-02-01), Ward
patent: 5672949 (1997-09-01), Ward
patent: 6067858 (2000-05-01), Clark et al.
patent: 6089089 (2000-07-01), Hsu
patent: 6230563 (2001-05-01), Juneau et al.
patent: 6386033 (2002-05-01), Negoro
patent: 6578420 (2003-06-01), Hsu
patent: 195 30 007 (1997-02-01), None
patent: 197 26 006 (1998-09-01), None
patent: 97 45699 (1997-12-01), None
patent: 01 71364 (2001-09-01), None

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