Rotating or rotatable compensator spectroscopic ellipsometer...

Details Rotating or rotatable compensator spectroscopic ellipsometer... Rotating or rotatable compensator spectroscopic ellipsometer...

2007-03-20

2007-03-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

10829620

ABSTRACT:
Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, andat least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; andat least one multiple element lens which also transmits the electromagnetic beam therethrough.

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Review paper by Collins, titled “Automatic Rotating Element Ellipsometers: Calibration, Operation and Real-Time Applications”, Rev. Sci. Instrum., 61(8) (1990), is identified for general information.

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