Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2005-08-15
2008-12-23
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07468794
ABSTRACT:
Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.
REFERENCES:
patent: 3905675 (1975-09-01), McCraker
patent: 4053232 (1977-10-01), Dill et al.
patent: 4877960 (1989-10-01), Messerschmidt et al.
patent: 4996120 (1991-02-01), Smothers et al.
patent: 5032734 (1991-07-01), Orazio, Jr. et al.
patent: 5148323 (1992-09-01), Campbell et al.
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5414559 (1995-05-01), Burghardt et al.
patent: 5426506 (1995-06-01), Ellingson et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5517312 (1996-05-01), Finarov
patent: 5521706 (1996-05-01), Green et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5666201 (1997-09-01), Johs et al.
patent: 5684642 (1997-11-01), Zumoto et al.
patent: 5796521 (1998-08-01), Kahlert et al.
patent: 5859424 (1999-01-01), Norton et al.
patent: 5872630 (1999-02-01), Johs et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5917594 (1999-06-01), Norton
patent: 5946098 (1999-08-01), Johs et al.
patent: 5963325 (1999-10-01), Johs et al.
patent: 5963327 (1999-10-01), He et al.
patent: 6084674 (2000-07-01), Johs et al.
patent: 6100981 (2000-08-01), Johs et al.
patent: 6134012 (2000-10-01), Aspnes et al.
patent: 6141102 (2000-10-01), Johs et al.
patent: 6184984 (2001-02-01), Lee et al.
patent: 6321601 (2001-11-01), Maris
He Ping
Herzinger Craig M.
Johs Blaine D.
Liphardt Martin M.
J.A. Woollam Co. Inc.
Toatley Jr. Gregory J
Valentin Juan D
Welch James D.
LandOfFree
Rotating compensator ellipsometer system with spatial filter... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Rotating compensator ellipsometer system with spatial filter..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rotating compensator ellipsometer system with spatial filter... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4051702