Rotating analyzer type ellipsometer

Optics: measuring and testing – By polarized light examination – Of surface reflection

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356364, G01J 400

Patent

active

046539247

ABSTRACT:
A rotating analyzer type ellipsometer comprises a rotating analyzer for receiving light which is impinged on a sample with a predetermined incident angle and reflected by the sample, a rotary phase detecting apparatus provided so as to rotate unitarily with the rotating analyzer for generating a rotary phase signal as the rotary phase detecting apparatus rotates, a rotating mechanism for rotating the rotating analyzer and the rotary phase detecting apparatus, a photodetector for producing an output responsive to light which is passed through the rotating analyzer, and a computer for obtaining a phase difference between the rotating analyzer and the rotary phase detecting apparatus from a phase difference .phi..sub.o with which a difference between an output I.sub.p of the photodetector and a theoretical value I.sub.o becomes a minimum or substantially zero by entering into the computer the output I.sub.p of the photodetector and calculating the theoretical value I.sub.o while changing the values of the output I.sub.p and an initial value .phi..sub.o of the phase difference.

REFERENCES:
patent: 4105338 (1978-08-01), Kuroha
"The Application of Intensity Transients in Ellipsometry" Brusic et al. Applied Optics, vol. 9, #7, 7/1970, pp. 1634-1639.
"A Digital Ellipsometer" Abe et al. Japanese Journal of Applied Optics, vol. 18, #1, 1/1979, pp. 165-167.
"High Precision Scanning Ellipsometer" Aspnes et al. Applied Optics vol. 14, #1, 1/1975, pp. 220-228.

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