Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1995-02-22
1996-07-16
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, H01J 37244
Patent
active
055369413
ABSTRACT:
An apparatus for recording electron images and diffraction patterns which can be automatically controlled via a computer, has improved precision, and has greater flexibility in acquiring and displaying specimen images is provided. The apparatus includes an electron microscope having a projection chamber, an electron scintillator in the projection chamber for converting a projected electron image into a light image, and a camera positioned adjacent to the projection chamber for acquiring the light image. The camera is rotatable about its optical (horizontal) axis so that desired features of the acquired image may be brought into alignment with the display device used to view them, such as for example, a CRT screen. By positioning the camera outside of the vacuum of the electron microscope projection chamber, problems associated with prior internally-mounted devices are avoided and the camera may be readily manually or automatically adjusted.
REFERENCES:
patent: 4739399 (1988-04-01), Swann et al.
patent: 5013915 (1991-05-01), Isakazawa et al.
patent: 5065029 (1991-11-01), Krivanek
Anderson Bruce C.
Gatan Inc.
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