Rod-shaped specimen holder for an optical corpuscular-beam appar

Details Rod-shaped specimen holder for an optical corpuscular-beam appar Rod-shaped specimen holder for an optical corpuscular-beam appar

1976-09-13

1978-07-18

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250442, G21K 506

Patent

active

041017781

ABSTRACT:
An optical corpuscular-beam apparatus including a rod-shaped specimen holder passing through a wall of the apparatus, which holder is secured in the apparatus wall by a first bearing and engages an adjustable counterbearing in the interior of the apparatus. The improvement of the invention comprises the first bearing comrising a diaphragm disposed circumferentially about the specimen holder and having an outer edge mechanically coupled to the apparatus wall.

REFERENCES:
patent: 2220973 (1940-11-01), Marton
patent: 3858049 (1971-12-01), Koch et al.

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