Robust measurement of parameters

Details Robust measurement of parameters Robust measurement of parameters

2006-05-25

2010-02-09

Cosimano, Edward R (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

C073S001010, C073S001880, C073S866100, C250S306000, C250S310000, C250S491100, C250S492200, C250S492300, C378S070000, C378S086000, C378S087000, C378S204000, C378S207000, C382S100000, C382S141000, C382S145000, C382S168000, C382S169000, C382S170000, C438S014000, C438S017000, C702S001000, C702S033000, C702S035000, C702S040000, C702S086000, C702S087000, C702S088000, C702S107000, C702S127000, C702S187000, C702S189000

Reexamination Certificate

active

07660687

ABSTRACT:
A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.

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patent: 4950911 (1990-08-01), Williams et al.
patent: 5416557 (1995-05-01), Nagasaki et al.

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