Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent
1991-08-16
1992-04-14
Spar, Robert J.
Material or article handling
Apparatus for charging a load holding or supporting element...
With simultaneous charging and discharging of plural load...
118725, C23C 1600
Patent
active
051042762
ABSTRACT:
A susceptor carrying semiconductor wafers for processing is suspended from a compliant attachment at its upper end and is lowered into a reaction chamber for processing. At the completion of processing, the susceptor is withdrawn vertically to permit a robot to unload the processed wafers and load unprocessed wafers. In order to fix the position of the susceptor during the loading operations, a support carriage is moved into position to engage the lower end of the susceptor. Noxious and corrosive chloride vapors are simultaneously withdrawn from the reaction chamber by a vacuum line attached to the support carriage.
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Carlson David K.
Lindstrom Paul B.
Severns David W.
Tompson Brian
Applied Materials Inc.
Hienz William M.
Spar Robert J.
Stoddard Robert
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