Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1992-10-29
1995-12-19
Underwood, Donald W.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
414222, B65G 4700
Patent
active
054763592
ABSTRACT:
A susceptor carrying semiconductor wafers for processing is suspended from a compliant attachment at its upper end and is lowered into a reaction chamber for processing. At the completion of processing, the susceptor is withdrawn vertically to permit a robot to unload the processed wafers and load unprocessed wafers. In order to fix the position of the susceptor during the loading operations, a support carriage is moved into position to engage the lower end of the susceptor. Noxious and corrosive chloride vapors are simultaneously withdrawn from the reaction chamber by a vacuum line attached to the support carriage.
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Carlson David K.
Lindstrom Paul R.
Severns David W.
Tompson Brian
Applied Materials Inc.
Morris Birgit E.
Underwood Donald W.
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