Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1986-05-08
1988-10-11
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
269 50, 269 51, G21K 510
Patent
active
047773723
ABSTRACT:
A platform for positioning inside an evacuated chamber is slidable in a y--y direction along a movable support member that is movable along an x--x direction perpendicular to the y--y direction. The movable support member is formed with end bearings that ride along a y-drive shaft that carries a first helical gear for meshing with a second orthogonal helical gear that rotates a feed screw accommodated by a threaded opening in the platform. An electric motor is coupled to the y-drive shaft through the wall of the evacuated housing with a vacuum sealing assembly.
REFERENCES:
patent: 2499019 (1950-02-01), Dornfeld
patent: 3648048 (1972-03-01), Cahan et al.
patent: 4274004 (1981-06-01), Kanai
patent: 4447731 (1984-05-01), Kuni et al.
patent: 4516029 (1985-05-01), Tucker
patent: 4587431 (1986-05-01), Uemura
Anderson Bruce C.
Hieken Charles
Micrion Limited Partnership
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