RF plasma power supply combining technique for increased stabili

Details RF plasma power supply combining technique for increased stabili RF plasma power supply combining technique for increased stabili

1995-03-06

1998-01-27

Mullins, James B.

Amplifiers

With plural amplifier channels

Redundant amplifier circuits

31511151, 330295, H03F 368

Patent

active

057125929

ABSTRACT:
An RF power amplifier including a splitter, two branch circuits, and a combiner. The splitter has an input line receiving an RF signal, a first output line carrying a first output signal derived from the RF signal, and a second output line carrying a second output signal derived from the RF signal. A first branch circuit receives the first output signal and generates therefrom a first derived signal. A second branch circuit receives the second output signal and generates therefrom a second derived signal therefrom. The first branch circuit includes a first power amplifier and a phase shifting element. The second branch circuit includes a second power amplifier. The combiner, which has a first input receiving the first derived signal and a second input receiving the second derived signal, combines the first and second derived signals to produce a power output signal therefrom. The phase shifting element is connected between the output line of the first power amplifier and the first input of the combiner and produces a phase shift in a signal passing from the first power amplifier to the combiner relative to a signal passing from the second power amplifier to the combiner.

REFERENCES:
patent: 4629940 (1986-12-01), Gagne et al.
patent: 4701716 (1987-10-01), Poole
patent: 4965527 (1990-10-01), Clark et al.
patent: 5101171 (1992-03-01), Redmond
patent: 5394061 (1995-02-01), Fujii

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