RF electrode contact assembly for a detachable electrostatic chu

Details RF electrode contact assembly for a detachable electrostatic chu RF electrode contact assembly for a detachable electrostatic chu

1998-07-31

2000-12-12

Sircus, Brian

Electrical connectors

With insulation other than conductor sheath

Plural-contact coupling part

439927, H01R 1324

Patent

active

06159055&

ABSTRACT:
An substrate support pedestal having an RF contact assembly that utilizes a canted spring to make electrical connection to the cathode. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.

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patent: 5454735 (1995-10-01), Nelson
patent: 5691876 (1997-11-01), Chen et al.
patent: 5764471 (1998-06-01), Burkhart

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