Retractable lens-coupled electron microscope camera with...

Details Retractable lens-coupled electron microscope camera with... Retractable lens-coupled electron microscope camera with...

2011-06-21

2011-06-21

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S310000, C348S079000, C348S080000

Reexamination Certificate

active

07964846

ABSTRACT:
A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.

REFERENCES:
patent: 4739399 (1988-04-01), Swann et al.
patent: 4852137 (1989-07-01), Mackay
patent: 5065029 (1991-11-01), Krivanek
patent: 5401964 (1995-03-01), Mancuso
patent: 5517033 (1996-05-01), Krivanek et al.
patent: 5536941 (1996-07-01), Swann
patent: 6061085 (2000-05-01), Daberkow et al.
patent: H08-264148 (1996-10-01), None

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