Reticle with antistatic coating

Details Reticle with antistatic coating Reticle with antistatic coating

2006-04-18

2006-04-18

Mohamedulla, Saleha R. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C428S014000

Reexamination Certificate

active

07029800

ABSTRACT:
A static resistant reticle comprises a substrate and a patterning layer and is covered by an antistatic conductive film of quaternary amine (R4N)+Cl−. A pellicle structure comprising an optically transparent membrane tightly stretched on a frame is also coated by an antistatic electro conductive film of a similar material. The reticle with the pellicle form a shielded structure isolating the reticle from ESD.

REFERENCES:
patent: 6569576 (2003-05-01), Hsueh et al.

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