Reticle pod with isolation system

Details Reticle pod with isolation system Reticle pod with isolation system

2006-02-26

2009-10-27

Lee, Diane I (Department: 2851)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C355S072000, C355S075000, C414S217100

Reexamination Certificate

active

07607543

ABSTRACT:
The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

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