Reticle inspection

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2005-02-01

2005-02-01

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

C716S030000, C716S116000, C716S030000

Reexamination Certificate

active

06850050

ABSTRACT:
An electric field is induced from a feature of a reticle, and the field is measured.

REFERENCES:
patent: 4443764 (1984-04-01), Suh et al.
patent: 5028866 (1991-07-01), Wiese
patent: 5101159 (1992-03-01), Bossard et al.
patent: 5448337 (1995-09-01), Williams
patent: 6232790 (2001-05-01), Bryan et al.
patent: 6529621 (2003-03-01), Glasser et al.
patent: 6583411 (2003-06-01), Altmann et al.

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