Abrading – Machine – Rotary tool
Reexamination Certificate
2007-07-19
2011-10-11
Rachuba, Maurina (Department: 3727)
Abrading
Machine
Rotary tool
C451S287000, C451S398000
Reexamination Certificate
active
08033895
ABSTRACT:
Retaining rings with curved surfaces are described. The curved surfaces prevent damage to a fixed abrasive polishing pad when the retaining ring is used in a polishing process. The curved surfaces are on the bottom surface of the ring, such as along the outer diameter and/or along the sidewalls of channels formed in the bottom of the ring.
REFERENCES:
patent: 5597346 (1997-01-01), Hempel, Jr.
patent: 5695392 (1997-12-01), Kim
patent: 5738574 (1998-04-01), Tolles et al.
patent: 6224472 (2001-05-01), Lai et al.
patent: 6251215 (2001-06-01), Zuniga et al.
patent: 6893327 (2005-05-01), Kajiwara et al.
patent: 6962520 (2005-11-01), Taylor
patent: 6974371 (2005-12-01), Chen et al.
patent: 7121927 (2006-10-01), Phang et al.
patent: 7575504 (2009-08-01), Zuniga et al.
patent: 2005/0113002 (2005-05-01), Chen et al.
patent: 2005/0126708 (2005-06-01), Chen et al.
patent: 2005/0191947 (2005-09-01), Chen et al.
patent: 2006/0240750 (2006-10-01), Oh et al.
patent: 2007/0143980 (2007-06-01), Doan et al.
patent: 2007/0224864 (2007-09-01), Burns et al.
patent: 2008/0160885 (2008-07-01), Winterlich et al.
patent: 2008/0196833 (2008-08-01), Chen et al.
patent: 10332624 (2005-02-01), None
patent: 2005005398 (2005-01-01), None
International Search Report and the Written Opinion of International Application Serial No. PCT/US2008/070463, dated Oct. 29, 2008, 10 pages.
Menk Gregory E.
Oh Jeonghoon
Prabhu Gopalakrishna B.
Yuan Yin
Applied Materials Inc.
Fish & Richardson P.C.
Rachuba Maurina
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