Retaining ring, flexible membrane for applying load to a...

Details Retaining ring, flexible membrane for applying load to a... Retaining ring, flexible membrane for applying load to a...

2007-04-27

2009-08-18

Rose, Robert (Department: 3727)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

07575504

ABSTRACT:
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A retaining ring assembly has a flexible membrane shaped to provide an annular chamber and an annular retaining ring, wherein annular concentric projections of the flexible membrane are sized to fit into annular concentric recesses of the annular retaining ring.

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Applied Materials, Inc., European Search Report for EP 07022411 dated Mar. 5, 2008, 6 pages.

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