Retaining ring deflection control

Details Retaining ring deflection control Retaining ring deflection control

2006-05-23

2006-05-23

Nguyen, Dung Van (Department: 3723)

Abrading

Work holder

Rotary

C451S398000

Reexamination Certificate

active

07048621

ABSTRACT:
A carrier bead for chemical mechanical polishing of a substrate. The carrier head includes a carrier base, a retaining ring, and a junction connecting the carrier base to the retaining ring. The junction is configured such that vertical movement of the retaining ring is substantially restrained relative to the carrier base. The junction is further configured such that the profile of a bottom surface of the retaining ring is substantially decoupled from flexing and/or expansion of carrier base.

REFERENCES:
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5643053 (1997-07-01), Shendon
patent: 5643061 (1997-07-01), Jackson et al.
patent: 5645474 (1997-07-01), Kubo et al.
patent: 5695392 (1997-12-01), Kim
patent: 5759918 (1998-06-01), Hoshizaki et al.
patent: 5993302 (1999-11-01), Chen et al.
patent: 6068548 (2000-05-01), Vote et al.
patent: 6077151 (2000-06-01), Black et al.
patent: 6110025 (2000-08-01), Williams et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6196905 (2001-03-01), Inaba
patent: 6251215 (2001-06-01), Zuniga et al.
patent: 6354928 (2002-03-01), Crevasse et al.
patent: 6422927 (2002-07-01), Zuniga
patent: 6558232 (2003-05-01), Kajiwara et al.
patent: 6565424 (2003-05-01), Katagiri et al.
patent: 6579151 (2003-06-01), Tseng et al.
patent: 6602116 (2003-08-01), Prince
patent: 6716094 (2004-04-01), Shendon et al.
Markworth et al., Active Piezo-Controlled Carrier for CMP Systems, IGAM, www.igam-mbh.de.

Affiliated with

Also associated with

Rating

Retaining ring deflection control does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Retaining ring deflection control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Retaining ring deflection control will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3645216