Restoration of CD fidelity by dissipating electrostatic charge

Details Restoration of CD fidelity by dissipating electrostatic charge Restoration of CD fidelity by dissipating electrostatic charge

1997-09-11

1999-11-02

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250251, 250310, H05H 300, H01J 3738

Patent

active

059775424

ABSTRACT:
An integrated circuit manufacturing process for substantially eliminating negative electrostatic charge on a wafer surface after resist processing, comprising contacting the wafer with a dilute electrolyte solution having positive ions, restores the fidelity of CD's as measured by low-voltage SEM'S.

REFERENCES:
patent: 4125440 (1978-11-01), Markovits
patent: 4259003 (1981-03-01), Mangal et al.
patent: 4265998 (1981-05-01), Barkley
patent: 5032422 (1991-07-01), Lalmirand et al.
patent: 5049404 (1991-09-01), Kisler et al.
patent: 5171709 (1992-12-01), Donelon et al.

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