Resonator, apparatus having the same and fabrication method...

Details Resonator, apparatus having the same and fabrication method... Resonator, apparatus having the same and fabrication method...

2007-02-02

2009-06-30

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S188000, C333S189000, C310S364000

Reexamination Certificate

active

07554426

ABSTRACT:
A resonator includes a substrate, and a resonating unit formed on the substrate, and having a lower electrode, a piezoelectric film, and an upper electrode. The lower electrode is formed of at least two layers to adjust a piezoelectric coupling coefficient. The lower electrode includes a first electrode layer and a second electrode layer, which have crystallographic characteristics, particularly, grain sizes or surface roughnesses Ra, different from each other, respectively. The first and the second electrode layers are formed to have a predetermined thickness ratio to each other.

REFERENCES:
patent: 6291931 (2001-09-01), Lakin
patent: 6407649 (2002-06-01), Tikka et al.
patent: 6462631 (2002-10-01), Bradley et al.
patent: 6936837 (2005-08-01), Yamada et al.
patent: 7180390 (2007-02-01), Umeda et al.
patent: 2002/0153965 (2002-10-01), Ruby et al.
patent: 2004/0046622 (2004-03-01), Aigner et al.
patent: 2004/0140868 (2004-07-01), Takeuchi et al.
patent: 2006/0131990 (2006-06-01), Milsom et al.
patent: 1 124 328 (2001-08-01), None
patent: 1 253 713 (2002-10-01), None
patent: 2001-156582 (2001-06-01), None
patent: 2005-244486 (2005-09-01), None
patent: 2005-286945 (2005-10-01), None
Satoh, Y., et al., “Development of Piezoelectric Thin Film Resonator and Its Impact on Future Wireless Communication Systems.”, Japanese Journal of Applied Physics, May 2005, p. 2883-2894, vol. 44 No. 5A, The Japan Society of Applied Physics.
Lee, S., et al., “Growth of highly c-axis textured AIN films on Mo electrodes for film bulk acoustic wave resonators.”, Journal of Vacuum Science and Technology, American Institute of Physics, Jan. 2003, p. 1-5, vol. 21, No. 1, American Vacuum Society.

Affiliated with

Also associated with

Rating

Resonator, apparatus having the same and fabrication method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Resonator, apparatus having the same and fabrication method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resonator, apparatus having the same and fabrication method... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4084952