Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-12-14
1989-07-25
Levy, Stewart J.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
73517AV, 156643, 156657, 156662, 437225, G01P 1508, G01P 1510
Patent
active
048510807
ABSTRACT:
An accelerometer is provided by a sample mass suspended in a central area of a support by pairs of resonating arms. One pair of arms lies on one axis through the sample mass. Another pair of arms lies on a second axis through the sample mass perpendicular to the one axis. Acceleration of the mass and support is detected by a measured change in resonant frequency of the arms of a pair. The measured change in resonant frequency is the magnitude of the acceleration and the axis along which the pair of arms lies provides the direction of the acceleration. Orthogonal components of acceleration are simultaneously measured by the pairs of arms lying on perpendicular axes. Electrostatic force-rebalance techniques and other known techniques for measuring acceleration in a direction perpendicular to the axes of the pairs of arms are readily incorporated to provide a third direction measurement of acceleration. The accelerometer is fabricated in a monolithic process which employs micromachining techniques.
REFERENCES:
patent: 3320568 (1967-05-01), Russell et al.
patent: 3382724 (1968-05-01), Wilcox
patent: 3541866 (1968-02-01), Mathey et al.
patent: 4071838 (1978-01-01), Block
patent: 4517841 (1985-05-01), Peters et al.
patent: 4553436 (1985-11-01), Hansson
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4670092 (1987-06-01), Montamedi
patent: 4679434 (1987-04-01), Stewart
patent: 4706374 (1987-11-01), Murakami
patent: 4736629 (1988-04-01), Cole
Angell, James B. et al.; Silicon Micromechanical Devices; Scientific American, Apr. 1983 pp. 44-55.
Roylance et al.; A Batch-Fabricated Silicon Accelerometer; IEEE Transactions on Electron Devices vol. ED-26; No. 12; Dec., 1979; pp. 1911-1917.
P. W. Barth, "Silicon Sensors Meet Integrated Circuits", 8045 IEEE Spectrum, vol. 18 (1981), pp. 33-39.
P. L. Chen, et al., "Integrated Silicon PI-FET Accelerometer With Proof Mass", Sensors and Actuators, 5:119-126 (1984).
William C. Albert, "Vibrating Quartz Crystal Beam Accelerometer", 28th Instrument Society of America International Instrumentation Symposium, Proceedings, 1982, pp. 33-44.
Roger T. Howe and Richard S. Muller, "Resonant-Microbridge Vapor Sensor", IEEE Transactions on Electron Devices, vol. ED-33, No. 4, Apr. 1986, pp. 499-506.
Martin A. Schmidt and Roger T. Howe, "Silicon Resonant Microsensors", Ceramic Engineering and Science Proceedings, Automotive Materials Conference, Nov. 19, 1986, pp. 1-20.
J. C. Greenwood, "Etched Silicon Vibrating Sensor", Journal of Physics E:Scientific Instrumentation, vol. 17, pp. 650-652, 1984.
Chang Shih-Chia
Howe Roger T.
Bell Robert P.
Levy Stewart J.
Massachusetts Institute of Technology
LandOfFree
Resonant accelerometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Resonant accelerometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resonant accelerometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2355908