Resonance contact scanning force microscope

Details Resonance contact scanning force microscope Resonance contact scanning force microscope

1993-04-28

1996-01-09

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 1124

Patent

active

054819083

ABSTRACT:
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: Re34331 (1993-08-01), Elings et al.
patent: 4851671 (1989-07-01), Pohl
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5144128 (1992-09-01), Hasegawa et al.
patent: 5289004 (1994-02-01), Okada et al.
patent: 5291775 (1994-03-01), Gamble et al.
patent: 5319960 (1994-06-01), Gamble et al.
patent: 5329808 (1994-07-01), Elings et al.
Topometrix Corporation, AFM Imaging Modes, Mar., 1993 pp. 1-16.

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