Resonance contact scanning force microscope

Details Resonance contact scanning force microscope Resonance contact scanning force microscope

1996-04-12

1997-10-28

Noland, Thomas P.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 1130

Patent

active

056819870

ABSTRACT:
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.

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