Electric heating – Metal heating – By arc
Patent
1997-09-16
2000-02-08
Paschall, Mark
Electric heating
Metal heating
By arc
21912144, 21912154, 219494, 118723I, 427 38, 156345, 1566461, B23K 1000, H05H 146
Patent
active
06023038&
ABSTRACT:
A method and apparatus for pre-heating a coil used to generate a plasma field in a processing chamber in a semiconductor fabrication system. The coil is pre-heated in the chamber prior to sputter depositing material onto a substrate and workpiece. The coil is pre-heated to a predetermined temperature, which is preferably equal to or greater than the equilibrium temperature attained by the coil during sputter deposition processes. Pre-heating may be effected with a preheating current having a frequency lower than the minimum frequency required to ignite a plasma, or when the processing chamber contains an atmosphere which prevents formation of a plasma. The coil may pre-heated for a predetermined time period.
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Paschall Mark
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