Resistive heater for thermo optic device

Details Resistive heater for thermo optic device Resistive heater for thermo optic device

2007-05-08

2007-05-08

Font, Frank G. (Department: 2883)

Optical waveguides

Directional optical modulation within an optical waveguide

Electro-optic

C385S008000, C438S029000, C438S031000, C438S032000

Reexamination Certificate

active

10929904

ABSTRACT:
Resistive heaters formed in two mask counts on a surface of a grating of a thermo optic device thereby eliminating one mask count from prior art manufacturing methods. The resistive heater is comprised of a heater region and a conductive path region formed together in a first mask count from a relatively high resistance material. A conductor formed from a relatively low resistance material is formed directly on the conductive path region in a second mask count. Thermo optic devices formed by these two mask count methods are also described.

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