Coating apparatus – Projection or spray type – Rotating turret work support
Patent
1996-12-17
1998-07-14
Czaja, Donald E.
Coating apparatus
Projection or spray type
Rotating turret work support
118 52, 118500, 269 21, 134153, 134902, B05B 1302
Patent
active
057797960
ABSTRACT:
The present invention provides a resist processing method for an object to be processed, including the processing step of supplying a process solution onto the object to be processed to perform a process on the object to be processed, and the cleaning step of supplying a cleaning solution onto the object to be processed to clean the object to be processed, wherein the processing step at least partially overlaps the cleaning step. The present invention also provides a resist processing method for an object to be processed, including the steps of positioning a process solution supply means for supplying a process solution above a quadrilateral object to be processed having a pair of opposing edges, moving the process solution supply means toward one edge of the pair of edges of the object to be processed relative to the object to be processed while supplying the process solution onto the object to be processed by the process solution supply means, and moving the process solution supply means from one edge of the object to be processed toward the other edge of the pair of edges of the object to be processed relative to the object to be processed while supplying the process solution onto the object to be processed by the process solution supply means.
REFERENCES:
patent: 4564280 (1986-01-01), Fukuda
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5062384 (1991-11-01), Foley et al.
Murakami Masaaki
Nishioka Kenichi
Tomoeda Takayuki
Czaja Donald E.
Padgett Calvin
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
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