Resist processing method and apparatus

Details Resist processing method and apparatus Resist processing method and apparatus

1996-04-29

1998-06-02

Bell, Janyce

Coating processes

Measuring, testing, or indicating

427240, 427299, 427336, 4273855, 427420, 427424, B65D 312

Patent

active

057596140

ABSTRACT:
The present invention provides a resist processing method for an object to be processed, including the processing step of supplying a process solution onto the object to be processed to perform a process on the object to be processed, and the cleaning step of supplying a cleaning solution onto the object to be processed to clean the object to be processed, wherein the processing step at least partially overlaps the cleaning step. The present invention also provides a resist processing method for an object to be processed, including the steps of positioning a process solution supply means for supplying a process solution above a quadrilateral object to be processed having a pair of opposing edges, moving the process solution supply means toward one edge of the pair of edges of the object to be processed relative to the object to be processed while supplying the process solution onto the object to be processed by the process solution supply means, and moving the process solution supply means from one edge of the object to be processed toward the other edge of the pair of edges of the object to be processed relative to the object to be processed while supplying the process solution onto the object to be processed by the process solution supply means.

REFERENCES:
patent: 4938994 (1990-07-01), Choinski
patent: 5136970 (1992-08-01), Saito et al.
patent: 5143759 (1992-09-01), Saito et al.

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