Material or article handling – Apparatus particularly adapted for charging or discharging a... – With means to transfer – or facilitate transfer of – vehicle...
Patent
1994-07-07
1995-08-15
Rutledge, D.
Material or article handling
Apparatus particularly adapted for charging or discharging a...
With means to transfer, or facilitate transfer of, vehicle...
354325, 414416, 414225, G03D 500
Patent
active
054424160
ABSTRACT:
A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage, and a waiting unit for temporarily holding the wafer which is to be processed. The waiting unit is arranged beside the passage and between the process units and it includes plural compartments partitioned in it.
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Akimoto Masami
Tateyama Kiyohisa
Ushijima Mitsuru
Rutledge D.
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
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