Resist processing apparatus having an interface section includin

Details Resist processing apparatus having an interface section includin Resist processing apparatus having an interface section includin

1995-04-26

1998-09-08

Graybill, David

Metal working

Barrier layer or semiconductor device making

118500, B65G 4907, B05C 1302

Patent

active

058039325

ABSTRACT:
A processing system comprising a loading/unloading section, a processing section and an interface section. The system further comprises a convey mechanism and at least two waiting sections. The convey mechanism can move in either direction between between the loading/unloading section and the interface section, for conveying objects to the processing units included in the processing section and conveying objects in either direction between the loading/unloading section and the interface section. The waiting sections are provided for temporarily holding an object before the convey mechanism conveys an object to the interface section.

REFERENCES:
patent: 5297910 (1994-03-01), Yoshioka et al.
patent: 5434644 (1995-07-01), Kitano et al.
patent: 5442416 (1995-08-01), Tateyama et al.
patent: 5565034 (1996-10-01), Nanbu et al.

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