Material or article handling – Apparatus particularly adapted for charging or discharging a... – With means to transfer – or facilitate transfer of – vehicle...
Patent
1992-06-25
1993-04-13
Griffin, Donald A.
Material or article handling
Apparatus particularly adapted for charging or discharging a...
With means to transfer, or facilitate transfer of, vehicle...
414217, 432121, G03D 504, B65G 106, F27B 900
Patent
active
052027163
ABSTRACT:
A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage, and a waiting unit for temporarily holding the wafer which is to be processed. The waiting unit is arranged beside the passage and between the process units and it includes plural compartments partitioned in it.
REFERENCES:
patent: 4764076 (1988-08-01), Layman et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 5015177 (1991-05-01), Iwata
Akimoto Masami
Tateyama Kiyohisa
Ushijima Mitsuru
Griffin Donald A.
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
LandOfFree
Resist process system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Resist process system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resist process system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1158607