Resist pattern forming method

Details Resist pattern forming method Resist pattern forming method

1996-07-15

1997-09-16

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Processing feature prior to imaging

430325, 430330, G03F 700

Patent

active

056679424

ABSTRACT:
A resist pattern forming method which includes:

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