Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2006-01-17
2006-01-17
Hamilton, Cynthia (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C216S027000, C430S270100, C526S316000
Reexamination Certificate
active
06986982
ABSTRACT:
Provided is a resist material that comprises a polymer compound represented by the following general formula (I):where R1and R2are each independently a hydrogen atom or an alkyl group; R3and R4are each independently an alkyl group; m and n are positive integers.
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Ohkuma Norio
Ueda Hikaru
Fitzpatrick ,Cella, Harper & Scinto
Hamilton Cynthia
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