Resist composition and method of pattern formation with the...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S915000, C430S325000, C430S326000, C430S175000, C522S031000, C522S032000

Reexamination Certificate

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07914965

ABSTRACT:
A resist composition comprises (A) a compound having a molecular weight of 3,000 or lower which has in its molecule a structure having two or more monovalent anions and a structure having two or more monovalent cations.

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