Resin for hydrophobitizing resist surface, method for...

Details Resin for hydrophobitizing resist surface, method for... Resin for hydrophobitizing resist surface, method for...

2008-09-09

2011-12-20

Walke, Amanda C. (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S905000, C430S913000, C428S482000

Reexamination Certificate

active

08080363

ABSTRACT:
A resin to be added to a resist composition and locally distributed on a resist film surface to hydrophobitize the resist film surface includes a residual monomer in an amount of 1 mass % or less to the resin as a whole in terms of solid content.

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