Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2005-12-20
2005-12-20
Blum, David S. (Department: 2813)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Reexamination Certificate
active
06977188
ABSTRACT:
First, an intermediate plate and a lower mold are clamped. Thus, a release film is sandwiched between a mold surface of the intermediate plate and a mold surface of the lower mold. In this state, the clamping of an upper mold and the intermediate plate begins. Thus, an enclosed space is formed. Thereafter, the enclosed space is forcibly evacuated. At this time, the upper mold and the intermediate plate is gradually clamped. As a result, the enclosed space is filled with a molten resin and the resin encapsulation mold is completed. According to this method, the release film is prevented from moving into the enclosed space. Thus, deformation or severing of a wire is avoided when the resin encapsulation molding is performed.
REFERENCES:
patent: 6471501 (2002-10-01), Shinma et al.
patent: 1189270 (2002-03-01), None
patent: 11274192 (1999-10-01), None
patent: 400586 (2000-08-01), None
Blum David S.
Fasse W. F.
Fasse W. G.
Towa Corporation
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