Resin composition, filling material, insulating layer and...

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With electrical contact in hole in semiconductor

Reexamination Certificate

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C257S698000, C257S774000, C257S781000, C257SE23011

Reexamination Certificate

active

07999354

ABSTRACT:
A resin composition of the present invention is used for forming a filling material which fills at least a through-hole of a semiconductor substrate, the through-hole extending through the semiconductor substrate in a thickness direction thereof and having a conductive portion therein. The resin composition is composed of: a resin having a radical-polymerizable double bond, a thermosetting resin and a resin which differs from the resin having the radical-polymerizable double bond and has an alkali-soluble group and a double bond; or a cyclic olefin resin. A filling material of the present invention is formed of a cured product of the above resin composition. An insulating layer of the present invention is formed of a cured product of the above resin composition. The insulating layer includes: a layer-shaped insulating portion provided on a surface opposite to a functional surface of the semiconductor substrate; and a filling portion integrally formed with the insulating portion and filling the through-hole. A semiconductor device of the present invention includes the above insulating layer.

REFERENCES:
patent: 6856023 (2005-02-01), Muta et al.
patent: 2003/0151144 (2003-08-01), Muta et al.
patent: 2005/0067713 (2005-03-01), Muta et al.
patent: 2006/0071347 (2006-04-01), Dotta
patent: 2000-31397 (2000-01-01), None
patent: 2001-209183 (2001-08-01), None
patent: 2001-352172 (2001-12-01), None
patent: 2003-289073 (2003-10-01), None
patent: 2004-123806 (2004-04-01), None
patent: 2005-216970 (2005-08-01), None
patent: 2006-16610 (2006-01-01), None
patent: 2006-108328 (2006-04-01), None
patent: 2006-343384 (2006-12-01), None
International Search Report for International Application No. PCT/JP2008/060713 mailed Jul. 22, 2008.

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