Reset switch for a micromachined device

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

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324662, 324686, 7351432, 361290, G01P 15125, G01R 2726

Patent

active

057480044

ABSTRACT:
In a circuit for use with a micromachined device having a movable mass that forms an inner electrode of a differential capacitor, oppositely phased square waves are applied to two outer electrodes of the differential capacitor. A reset voltage is applied to the inner electrode synchronously with the square waves to stabilize and control the potential on the inner electrode. The signal on the inner electrode is demodulated by sampling during a first half of the square wave and a second half of the square wave between applications of the reset pulse to obtain a voltage that does not contain noise due to the reset switch.

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