Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2006-02-09
2008-10-28
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S304000, C250S306000, C250S309000, C250S310000, C250S251000, C250S424000, C250S441110, C250S3960ML, C250S492210, C250S492200, C250S492220, C250S39600R, C430S005000, C430S296000, C428S141000, C438S800000, C216S002000
Reexamination Certificate
active
07442924
ABSTRACT:
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts impinge on the sloping sidewalls formed by previous cuts. The high angle of incidence provides a greatly enhanced mill rate, so that making multiple overlapping cuts to produce a wide trench can requires less time than making a single, deep cut around the perimeter of a sample.
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Anzalone Paul
Giannuzzi Lucille A.
Phifer, Jr. Daniel W.
Young Richard
Berman Jack I
FEI Company
Griner David
Sahu Meenakshi S
Scheinberger & Griner, LLP
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