Repetitive circumferential milling for sample preparation

Details Repetitive circumferential milling for sample preparation Repetitive circumferential milling for sample preparation

2006-02-09

2008-10-28

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S304000, C250S306000, C250S309000, C250S310000, C250S251000, C250S424000, C250S441110, C250S3960ML, C250S492210, C250S492200, C250S492220, C250S39600R, C430S005000, C430S296000, C428S141000, C438S800000, C216S002000

Reexamination Certificate

active

07442924

ABSTRACT:
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts impinge on the sloping sidewalls formed by previous cuts. The high angle of incidence provides a greatly enhanced mill rate, so that making multiple overlapping cuts to produce a wide trench can requires less time than making a single, deep cut around the perimeter of a sample.

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