Coating processes – Restoring or repairing
Reexamination Certificate
2006-06-27
2010-10-05
Kornakov, Michael (Department: 1714)
Coating processes
Restoring or repairing
C106S010000, C106S270000, C106S003000, C106S404000, C106S453000, C106S456000, C106S464000, C106S475000, C106S481000, C427S337000, C427S539000, C427S387000, C427S389000, C427S391000, C427S535000, C427S216000, C427S221000, C427S222000, C438S004000, C438S623000, C438S637000, C438S778000, C438S781000, C524S588000, C524S730000, C524S773000, C524S780000, C524S785000, C524S786000, C524S788000, C524S789000, C524S837000, C524S847000, C524S858000, C524S859000
Reexamination Certificate
active
07807219
ABSTRACT:
A process of repairing a plasma etched low-k dielectric material having surface-bound silanol groups includes exposing at least one surface of the dielectric material to (a) a catalyst so as to form hydrogen bonds between the catalyst and the surface-bound silanol groups obtaining a catalytic intermediary that reacts with the silane capping agent so as to form surface-bound silane compounds, or (b) a solution comprising a supercritical solvent, a catalyst, and a silane capping agent so as to form hydrogen bonds between a catalyst and the surface-bound silanol groups obtaining a catalytic intermediary that reacts with the silane capping agent so as to form surface-bound silane compounds. Horizontal networks can be formed between adjacent surface-bound silane compounds. The dielectric material can be further treated with an organic acid so as to catalyze a hydrolytic reaction with alkoxy groups on the surface-bound silane compounds forming silanol groups that can be condensed via heat to remove water as a byproduct.
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Buchanan & Ingersoll & Rooney PC
Kornakov Michael
Lam Research Corporation
Weddle Alexander
LandOfFree
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