Removing uncured emulsion from stencils during photomask product

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

430269, 430308, 239127, 156905, 1562724, B32B 3100

Patent

active

053665848

ABSTRACT:
Uncured emulsion is effectively washed from a stencil in the production of photomasks by mounting a drum rotatable about a horizontal axis within a portable cabinet. The drum is driven by a small (e.g. variable speed 1/16 HP) electric motor and spins at about 50-100 rpm. Water is sprayed onto the stencil mounted on the drum at about 80 psi by 4-10 V-jet nozzles. Liquid running off the stencil is collected by a catch basin mounted just below the drum, and passes through a drain pipe with strainer into a heat insulated holding tank with an electric resistance heating element, and is recirculated from the tank to the spray nozzles-by a high pressure pump. The pump and motor are controlled by a timer, and after completion of the washing cycle the stencil is removed from the cabinet.

REFERENCES:
patent: 3915832 (1975-10-01), Rackus et al.
patent: 4004782 (1977-01-01), Jeppsen
patent: 4253910 (1981-03-01), Mason et al.
patent: 4720330 (1988-01-01), Shabrang et al.
patent: 4985111 (1991-01-01), Ketelhohn

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