Removal of surface oxides by electron attachment

Details Removal of surface oxides by electron attachment Removal of surface oxides by electron attachment

2011-03-01

2011-03-01

Olsen, Allan (Department: 1716)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

Electrolyte composition or defined electrolyte

C205S640000, C205S652000

Reexamination Certificate

active

07897029

ABSTRACT:
The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.

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