Liquid purification or separation – Constituent mixture variation responsive
Reexamination Certificate
2005-03-23
2009-06-23
Cecil, Terry K (Department: 1797)
Liquid purification or separation
Constituent mixture variation responsive
C210S134000, C210S143000, C210S254000, C096S397000
Reexamination Certificate
active
07550075
ABSTRACT:
A method and apparatus for removing contaminants from a fluid are disclosed. The fluid is introduced into a decontamination chamber such that the fluid is cooled and contaminants fall out within the decontamination chamber, producing a purified fluid. The purified fluid is then retrieved and can be used in a supercritical processing system.
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Bertram Ronald Thomas
Scott Douglas Michael
Cecil Terry K
Haverstock & Owens LLP
Tokyo Electron Ltd.
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