Chemistry: physical processes – Physical processes – Melting out
Reexamination Certificate
2011-08-16
2011-08-16
Johnson, Edward M (Department: 1736)
Chemistry: physical processes
Physical processes
Melting out
C588S253000, C588S255000
Reexamination Certificate
active
07998224
ABSTRACT:
A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.
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Carlson Frederick
Kellerman Peter L.
Sinclair Frank
Johnson Edward M
Varian Semiconductor Equipment Associates Inc.
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