Removable gas injectors for use in chemical vapor deposition of

Details Removable gas injectors for use in chemical vapor deposition of Removable gas injectors for use in chemical vapor deposition of

1994-05-11

1995-06-20

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

222566, C23C 1600, C23C 1612

Patent

active

054258103

ABSTRACT:
A removable gas injector design compatible for use in chemical vapor deposition reactors that allows proper mixing of the reactant gases, reduced cycle time associated with cleaning of gas injector components, and elimination of uncertainties associated with manual cleaning of the injector. A better reliability to the system due to the known condition of the nozzle after a clean is achieved.

REFERENCES:
patent: D297160 (1988-08-01), Robbins
patent: 4446815 (1984-05-01), Kalbskopf et al.
patent: 4473171 (1984-09-01), Nunlist
patent: 4798165 (1989-01-01), de Boer
patent: 4825809 (1989-05-01), Mieno
patent: 4926793 (1990-05-01), Arima
patent: 5050534 (1991-09-01), Yates
patent: 5067437 (1991-11-01), Watanabe
patent: 5136975 (1992-08-01), Bartholomew et al.
patent: 5146869 (1992-09-01), Bohannon
patent: 5268034 (1993-12-01), Vukelic
patent: 5273586 (1993-12-01), Kim
patent: 5279670 (1994-01-01), Watanabe
patent: 5320680 (1994-06-01), Learn

Affiliated with

Also associated with

Rating

Removable gas injectors for use in chemical vapor deposition of does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Removable gas injectors for use in chemical vapor deposition of , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Removable gas injectors for use in chemical vapor deposition of will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1842026