Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2005-07-26
2005-07-26
Sircus, Brian (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S143000, C361S145000, C361S144000, C279S128000
Reexamination Certificate
active
06922324
ABSTRACT:
Substrates such as silicon wafers, flat panel displays, and hard disk drive head substrates are electrostatically gripped using power derived from a physically separated source. Noncontacting coupling permits operation in vacuum as a result of its efficient energy conversion. Bidirectional communications between a controller and the remote gripper electronics along its power coupling lines is enabled. Inclusion of a communications link allows monitoring of system status and full control over the substrate sensing, grip, and release processes. The system of the present invention provides freedom from rf bias filtering considerations, and enables installation of grippers on robot arms without stretching, bending, or sliding electrical connections.
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patent: 4354149 (1982-10-01), Armond et al.
patent: 5504485 (1996-04-01), Landt et al.
patent: 6005376 (1999-12-01), Mett et al.
patent: 6032546 (2000-03-01), Stone
patent: 6075375 (2000-06-01), Burkhart et al.
patent: 6081414 (2000-06-01), Flanigan et al.
Rodriguez Isabel
Sircus Brian
LandOfFree
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