Remote plasma source

Details Remote plasma source Remote plasma source

1996-11-18

1998-12-01

Paschall, Mark H.

Electric heating

Metal heating

By arc

2191214, 21912151, 156345, 20429838, B23K 1000

Patent

active

058441956

ABSTRACT:
The present invention provides a remote plasma source mountable on a process chamber and connectable on one end to a gas inletting system and on the other end to a gas distribution system disposed in a process chamber. Preferably, a conventional microwave generator is utilized to deliver microwaves into a remote chamber to excite a gas passed therethrough into an excited state.

REFERENCES:
patent: 4065369 (1977-12-01), Ogawa et al.
patent: 4423303 (1983-12-01), Hirose et al.
patent: 4785962 (1988-11-01), Toshima
patent: 4804431 (1989-02-01), Ribner
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4902099 (1990-02-01), Okamoto et al.
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5133284 (1992-07-01), Thomas et al.
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5275303 (1994-01-01), Szalai
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5302209 (1994-04-01), Maeda et al.
patent: 5349154 (1994-09-01), Harker et al.
patent: 5359177 (1994-10-01), Taki et al.
patent: 5363872 (1994-11-01), Lorimer
patent: 5469035 (1995-11-01), Lowrance
patent: 5494494 (1996-02-01), Mizuno et al.
patent: 5505779 (1996-04-01), Mizuno et al.
patent: 8746859 (1996-11-01), Kroeker
patent: 8749611 (1996-11-01), Blum et al.
patent: 8749612 (1996-11-01), Fairbairn et al.
patent: 8749613 (1996-11-01), Fairbairn et al.
patent: 8749614 (1996-11-01), Sunder
patent: 8751463 (1996-11-01), Altwood et al.
patent: 8751471 (1996-11-01), Fairbairn et al.
patent: 8751484 (1996-11-01), Fairbairn et al.
patent: 8751485 (1996-11-01), Maydan et al.
patent: 8751524 (1996-11-01), Fairbairn et al.
patent: 8752462 (1996-11-01), Lane et al.
Z. Shiller and S. Dubowski, "Robot Path Planning with Obstacles, Actuator, Gripper, and Payload Constraints," International Journal of Robotics Research, vol. 8, No. 6, Dec. 1989, pp. 3-18.
Z. Shiller and H.H. Lu, "Computation of Path Constrained Time Optimal Motions With Dynamic Singularities," Transactions of the ASME, Journal of Dynamic Systems, Measurement, and Control, vol. 114, Mar. 1992, pp. 34-40.

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