Reliable, modular, production quality narrow-band high rep rate

Details Reliable, modular, production quality narrow-band high rep rate Reliable, modular, production quality narrow-band high rep rate

1999-03-19

2000-01-25

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Control of pulse characteristics

372 38, 372 92, 372 58, 372 86, 372 87, 372102, 372 34, 372 82, 372 37, 372 60, H01S 310

Patent

active

060185376

ABSTRACT:
The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

REFERENCES:
patent: 5856991 (1999-01-01), Ershov

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