Semiconductor device manufacturing: process – Making field effect device having pair of active regions...
Reexamination Certificate
2009-03-11
2011-10-11
Dickey, Thomas L (Department: 2893)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
C257S213000, C257SE21409, C257SE29309
Reexamination Certificate
active
08034670
ABSTRACT:
A method of forming a semiconductor device is presented. A substrate prepared with a second gate is provided. The second gate is processed to form a second gate with a rounded corner and a first gate is formed on the substrate. The first gate is adjacent to and overlaps a portion of the second gate and the rounded corner.
REFERENCES:
patent: 6133098 (2000-10-01), Ogura et al.
patent: 6284598 (2001-09-01), Kelley et al.
patent: 6429054 (2002-08-01), Krishnan et al.
patent: 2002/0098653 (2002-07-01), Flagan et al.
Indajang Bangun
Phua Timothy
Sohn Dong Kyun
Dickey Thomas L
GLOBALFOUNDRIES Singapore Pte. Ltd.
Horizon IP Pte Ltd
Yushin Nikolay
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